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UHV
MultiCentre Manipulator Solutions |
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Up to
six axis UHV manipulators
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Four axis
UHV manipulator example
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UHV Design offers a complete range of
manipulators based upon the MultiBase XY
stages, which provide +/-14mm and +/-31mm XY motion. These can
then be fitted with one of over two hundred Linear Shift Mechanisms
offering up to 1m Z motion.
Additionally, UHV Design's range of rotary feedthroughs
can be utilised to enable up to two independent axis of rotation, offering
a total of six axis of manipulation. |
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The XYZ manipulator shown to the left
(above) is based upon the smaller XY64/35 MultiBase stage. It provides
+/-14mm X/Y motion (vector) and is shown with manual actuation. A Linear Shift Mechanism is mounted on top, providing
250mm Z motion, which in this case is stepper motor driven. A
manual MD25 MagiDrive
rotary feedthrough completes the stage providing continuous rotation
through the center. |
| Complete
substrate heating and cooling solutions |
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Six-axis
UHV manipulator example |
UHV Design's offering is further
enhanced by its unique knowledge of substrate heating stages, the
EpiCentre range. Combing the EpiCentre heating and cooling technology with MultiBase
XYZ stages, whilst exploiting UHV Design's ability to offer one-off
customised solutions, provides a complete manipulator solution.
Examples are included below. Please contact
sales for further information. |
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The XYZ manipulator to the right
(above) shows
the larger XY100/64 MultiBase manipulator, again in a manual
configuration, providing +/-31mm (vector) X/Y motion. The Linear
Shift Mechanism mounted on top provided 100mm Z motion via a manual
handwheel and was fitted with a 'stack' of MagiDrive rotary
feedthroughs,
allowing three independent axis of rotation. |
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Complete
UHV Manipulator Solutions
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Four Axis
stage with heating and cooling |
| The stage above provided
+/-22mm X & Y motion, with 100mm Z motion and +/-120 degrees primary
rotation. Additionally, unique 'Cold Lance' technology (patent
applied for) was employed to provide LN2 sample cooling. A
multi-function, constant thrust, linear shift mechanism actuated the
cooling mechanism, enabling sample locking. The stage was fitted
with a digital linear scale for position indication. |
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| Four-axis
stage with heating and Faraday cup |
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Heater
stage and Faraday cup 'close-up' |
| The above UHV manipulator was based upon
the
XY100/64-H MultiBase. It provided +/-31mm XY motion
(vector), 100mm Z motion via a linear
shift mechanism and continuous motorised rotation with the MD35
MagiDrive. The manipulator was fitted with a service collar to
introduce power, thermocouple and sensor cables to the substrate stage
shown at the bottom. A 'close up' view is shown to the right. |
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In addition to the manipulation
already described, the manipulator was fitted with a refractory metal
heater module, fitted with a PgG heater element and W/Re thermocouple,
enabling heating of a 10mm diameter sample to 1000 degrees
Celsius. This is shown at temperature to the right of the
photograph. The manipulator was also fitted with a customised
Faraday cup assembly. Please contact
sales for further information. |
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