Controllers and Power Supplies

The EpiCentre range is configured to allow the use of existing motor, temperature controller and heater power supplies. Where new equipment is required UHV Design offer complete solutions from a series of high quality, modular, control packages.

UHV Design Temperature Controller

Substrate Rotation

EpiCentre stages with wafer or sample rotation requirements may be fitted with DC or stepping motors. The DC option is preferred for smooth drive, however, if indexing or positioning of the substrate is required then a stepping motor should be selected.

Stepping Motors Substrate Heating

The UHV Design PSMCC is the ideal system for all aspects of EpiCentre stepping motor control. Supplied with its own Windows based software, it may be used as an independent motor drive system. Alternatively it may be linked to an existing host controller. Click here for full details of this product.

For optimal stage heating the TC1 Temperature Controller has been configured to drive a series of Glassman, high performance, DC power supplies. The Glassman offers reliable, low noise operation, with minimal element stress and RHEED interference.

D.C. Motors

The TC1 Temperature Controller is based on an industry standard Eurotherm which, is used to regulate the Glassman such that the measured temperature matches the desired setpoint temperature. High accuracy temperature control is achieved with proportional, integral and derivative (PID) bands being tuned to match the specific element and operating range. The TC1 is CE compliant and can be supplied with a range of features. Please contact UHV Design for further details.

If DC motors are selected for the EpiCentre substrate spin system, then the Rotation Controller DCMC may be used. This unit is essentially a smooth 24VDC power supply with variable speed control. A rear panel connector allows remote operation from a 0-10 volt source. The unit is housed in a half rack, 3U enclosure and complies with CE regulations.

UHV Design Rotation Controller

The Glassman is offered in 1.2kW, 2.8kW and 6kW versions to suit the variation of EpiCentre options.
Glassman Power Supply
Click here to return to the EpiCentre 282 specification page