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| Controllers
and Power Supplies |
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The EpiCentre range is configured to
allow the use of existing motor, temperature controller and heater power
supplies. Where new equipment is required UHV Design offer complete
solutions from a series of high quality, modular, control packages. |
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| Substrate Rotation |
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EpiCentre stages with wafer or sample
rotation requirements may be fitted with DC or stepping motors. The DC
option is preferred for smooth drive, however, if indexing or
positioning of the substrate is required then a stepping motor should be
selected. |
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| Stepping Motors |
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Substrate Heating |
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The UHV Design PSMCC is the ideal
system for all aspects of EpiCentre stepping motor control. Supplied
with its own Windows based software, it may be used as an independent
motor drive system. Alternatively it may be linked to an existing host
controller. Click
here for full details of this product. |
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For optimal stage heating the TC1
Temperature Controller has been configured to drive a series of Glassman,
high performance, DC power supplies. The Glassman offers reliable, low
noise operation, with minimal element stress and RHEED interference. |
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| D.C. Motors |
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The TC1 Temperature Controller is
based on an industry standard Eurotherm which, is used to regulate the
Glassman such that the measured temperature matches the desired setpoint
temperature. High accuracy temperature control is achieved with
proportional, integral and derivative (PID) bands being tuned to match
the specific element and operating range. The TC1 is CE compliant and
can be supplied with a range of features. Please contact UHV Design for
further details. |
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If DC motors are selected for the
EpiCentre substrate spin system, then the Rotation Controller DCMC may
be used. This unit is essentially a smooth 24VDC power supply with
variable speed control. A rear panel connector allows remote operation
from a 0-10 volt source. The unit is housed in a half rack, 3U enclosure
and complies with CE regulations. |
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The Glassman is offered in
1.2kW, 2.8kW and 6kW versions to suit the variation of EpiCentre
options. |
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| Click
here to return to the EpiCentre 100 |