Sample/wafer cradles

Cradle assemblies are custom designed to support a standard wafer, single or multiple sample holder platen.  Refractory metal cradles have been fashioned to adapt to most common sample handling techniques.

RF or DC biasing

The EpiCentre biasing module provides up to 2kV DC isolation or 80W RF potential to the substrate. Please contact sales for further information.

Sample/wafer rotation

The patented MagiGear offers a simple, robust and clean rotation system.  This unique eccentric feedthrough transmits rotation through a solid vacuum enclosure to an internal torque tube with a massive 47mm clear bore.  This provides the access for power, cooling, thermocouple or even independent pumping of the heater module.  The absence of gears and use of well-proven precision ball races ensures hydrocarbon free operation with negligible particulate generation. The DC motorised MagiGear is available in a single, double or triple stack configuration to match cradle inertia.