|
EpiCentre 100 UHV manipulator series |
|
|
|
As each application demands differing
capabilities, the EpiCentre 100 series was developed in a modular
fashion, enabling users to select from a variety of modules to suit
their specific needs. This modular design enables the 100 series to
provide both sophisticated multi-axis control, for production
requirements, or simple hand wheel operated manipulation for cost
effective research and development applications.
|
| The
photograph below shows how a typical EpiCentre 100 stage is configured
using the various modules offered. Detailed information for each
module is then available via the links below. |
|
|
| 1.
Heater
module service collar providing access for power and thermocouple
connections |
|
2.
Linear
shift mechanism for retracting the heater module from the sample cradle
to enable space for sample transfer |
| 3.
MagiGear
for continuous substrate rotation |
4.
Linear
shift mechanism for manipulating the entire stage to facilitate wafer
hand-off or deposition adjustment |
| 5.
RF/DC
biasing connection |
|
6.
System
mounting flange |
|
7.
Transit
stand |
| 8.
Refractory
metal heater module |
9.
Rotating
cradle for sample or wafer support |
|
|
