|
EpiCentre 282
General Specification |
| Primary drive system |
MD 35 Power Drive for manual
positioning of substrate for deposition, transfer, flux monitoring etc.
The MD35 is fitted with an indexing head for fast and simple
positioning. The RHEED position is adjustable to enable fine tuning of
experiments. |
| Secondary drive system |
MD16 MagiDrive for continuous
substrate rotation, fitted with a DC or stepping motor. Including an
extended bearing housing for pinion support. |
| Heater module |
 |
Designed for sample heating up to
850ºC (based on heating a Mo test block). |
|
PgG, PBNG elements (further
options upon request) |
|
Estimated current for 650 watt
heating is less than 12 amps |
|
Type C, Tungsten Rhenium (W/Re)
thermocouple |
|
Refractory metal enclosure |
|
Optional quartz disc guard for
heater protection |
|
| Sample |
Molybdenum sample cradle assembly
configured to accept nominal 75mm sample blocks |
| System flange adapter |
CFNW150 (8” OD) CF flange fitted
with porting for Rotary drive stack; Main substrate shutter; Power and
thermocouple feedthrough; Flux monitor |
| Controllers / Power
supply |
D.C.
Motor controller (DCMC), Stepper
motor controller (PSMCC), Temperature
controller (TC1) and Glassman power options |
