EpiCentre 282 Heater Modules

EpiCentre 282 heater modules are capable of attaining wafer temperatures up to 1000ºC. By virtue of the exceptional coupling of heat to the wafer, the elements run at considerably lower temperature than conventional metal heaters. Clean operation is ensured with the use of: -

As standard, heater modules are available with three types of element, though other options are available upon request.

PgG elements

Pyrolitic Graphite coated Graphite (PgG) elements are the standard type used for the EpiCentre deposition stages. Robustness, reliability, high temperature capability and excellent uniformity are all aspects that make this element desirable and affordable.

PBN coated Graphite elements

Graphite elements with Pyrolitic Boron Nitride coatings (PBNG) are also available. These elements cut down the amount of Graphite exposure to the system, hence minimising the possibility of application doping, though two areas of graphite remain exposed to enable electrical contact. This option enables an affordable alternative to the standard PgG element.

PBN elements

Pyrolitic Boron Nitride (PBN) elements are made from a grown PBN disc with a graphite film, etched into an element formation. This is then coated/sealed with a PBN layer to minimise exposure to the system. As before, two graphite areas remain exposed to the system to enable electrical contact. This design offers robust, long life, low current heating.