The principal concept of the EpiCentre 346 series is to provide a simple stage that offers sample heating, rotation and wafer hand-off manipulation. Apart from the variation in the wafer size and heater module style, this stage is not offered with any further options, thus ensuring a simple and cost effective solution to substrate treatment.

Unlike the 100 series, the 346 manipulates the wafer cradle only.  This is achieved by using an externally driven leadscrew mechanism in the form of the LSM16, click here for detail on the LSM16.  The design replaces the internal mechanism previously used, providing a simplified, cost effective solution.  The LSM16 is typically manually actuated via a handwheel, though remote control options are available.

A recent addition to this range is the quartz-enclosed heater module, as offered in the 100 series. The stage may be installed in any orientation, making it a suitable choice for CVD applications.