EpiCentre Quotation Request Form
Contact Details
Name
Company
Address
E-mail
Phone
Fax
Applications Details
What size are the samples/wafers?
What material are the samples?
Are the samples/wafer supported or holder free?
What is the application? ie. MBE, sputtering, CVD..
What is the systems ultimate and operating pressure?
Are gases involved with your process? If so, please state partial pressures before and during deposition.
Are any of the following incompatible with your process? ie. will they react?
Tantalum
Molybdenum
Stainless steel
Type 'C' thermocouple
Type 'K' thermocouple
What orientation is the stage to be mounted?
Vertical wafer facing down
Vertical wafer facing up
Horizontal
Other (please specify)
Is rotation required? If so, please state the required spin speed (RPM).
Is the substrate heated? If so, please state the temperature required.
Do you required substrate biasing? If so, DC or RF? Volts/Watts?
Do you need to adjust the deposition height? If so, by how much?
Do you need 'Z' motion to facilitate sample/wafer transfer? If so, how much?
Do you require a controller/power supply?
Will RHEED be used?
Additional comments or requirements.
