Heater Module form

What size are the samples/wafers?
What material are the samples?
Are the samples/wafer supported or holder free?
What is the application? ie. MBE, sputtering, CVD..
What is the systems ultimate and operating pressure?
To what temperature do wish to heat the samples?
For how long will the sample be heated during a typical cycle?
Are gases involved with your process? If so, please state partial pressures before and during deposition.
Are any of the following incompatible with your process? ie. will they react?	Tantalum	Molybdenum
	Stainless steel	Type 'C' thermocouple
	Type 'K' thermocouple
What orientation is the stage to be mounted?	Vertical wafer facing down
	Vertical wafer facing up
	Horizontal
	Other (please specify)
Additional comments or requirements.