XYZT MultiMotion providing:
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+/-12.5 mm X&Y motion
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50 mm to 200 mm Z motion
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+/-2 degrees of manual tilt motion
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Manual or motorised actuation for X,Y&Z motion
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Ability to upgrade actuation options for each axis retrospectively (excludes tilt)
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High load carrying capability
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Engineered for stability & precision
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High performance, competitively priced, single bellows design
For space restricted applications the combination XYZT MultiMotion series manipulator is ideally designed and priced. It’s rugged construction and smaller platform is ideal for surface science chambers where space is a premium. The use of micrometer actuation provides for accurate, precise adjustment of the sample position relative to measuring equipment whilst a built in +/- 2 degrees tilt of the traveling flange assists with alignment issues and overall makes the MultiMotion stage a very attractive solution for many applications.
Z-motion is provided by a precision lead screw and calibrated handwheel, each increment corresponding to 0.01mm of motion. The drive is kinematic in design and provides smooth motion over extended travels.
X & Y motion is provided by precision micrometer drives having a 0.001mm resolution capability. Tilt is achieved via opposed jack screws.
General Specification
XYZT Model
XYZT64
Travelling flange
CF64 114 mm (4.5”) OD with M8 straddled holes
Mounting flange
CF64 114 mm (4.5”) OD with M8 straddled holes
XY travel
+/-12.5 mm
XY resolution
Manual drive 0.001 mm, Stepping motor 0.0025mm per half step
Actuation options
Manual via micrometers. DC or stepper motor driven.
Z travel
Z shifts are available with following strokes as standard: 50, 100, 150, and 200mm.
Actuation
Manual handwheel actuation. Motorisation via side-mounted DC or stepper motors.
Z resolution
Manual drive +/- 0.25 mm with engraved scale, stepping motor +/- 0.0005 mm
Flange tilt
+/-2 degrees
Clear bore
65mm
Bakeout temperature
240 degreesC with motors removed
Max probe dia
29.5mm is maximum while retaining full XY capability
| XYZT actuation option (tilt axis manual actuation only) | |
| Code | Actuation method |
| H | Manual handwheel / micrometer |
| D | DC motor (all axes excluding tilt) |
| S | Stepper motor (all axes excluding tilt) |
| Z travel options | |
| Code | Z travel |
| 50 | 50 mm (2”) |
| 100 | 100 mm (4”) |
| 150 | 150 mm (6”) |
| 200 | 200 mm (8”) |
| Travelling Flange | |||||||
| Motion | X | Y | Z | ||||
| Travel |
+/-12.5mm |
+/-12.5mm |
50, 100, 150, & 200mm |
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| Resolution |
+/-0.001mm |
+/-0.001mm |
+/-0.01mm |
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| Tilt about axis |
+/-2O |
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