Sample Heater / Deposition Stages

UHV Design offer a standard range of EpiCentre substrate manipulator stages suitable for heating and rotating samples of 4" & 6" diameter, configured in either 'sputter up' or 'sputter down' orientation, with two insertion length options, plus MagiGear motor options offered as standard.  Noting the specification offered below, you can go on to configure your own Epi-PRO stage using the product code selector. Where your requirement strays from the standard configuration, please contact us with your specific requirements, or submit a request for quotation based upon your configured specification, and we will be pleased to offer a stage to best suit your requirements accordingly.

General EpiPRO Specification
Sample/wafer capability	Ø 100mm & 150mm (4” & 6”) as standard [2" & 8" options available upon request]
Standard heater element	PgG as standard (others upon request)
Maximum temperature	1200ºC for standard heater modules (based on heating a Mo test block)
Temperature uniformity	Nominally +/-2.5ºC across the central 90% of a Si wafer
Insertion length	Standard options either 240mm or 300mm
Thermocouple	Two, 'O' ring sealed, sheathed type ‘K’ (Chromel Alumel) thermocouples. (UHV feedthroughs also available upon request)
OPTIONAL - Biasing capabilities DC system, combined DC and RF system	2kV DC isolation 2kV DC isolation / 80W RF power
MagiGear - motor options	MagiGear rotary feedthrough can be specified with either 'Smart Motor', a stepper motor, or fitted with NEMA23 frame motor provisions for customer to fit their preferred motor type. The MagiGear will then provide continuous sample rotation, up to 80rpm.
Sample transfer facility	25mm magnetically coupled and pneumatically actuated lowering of the cradle to facilitate sample transfer.
Position sensing	External magnetic proximity home switch assembly to enable position sensing for sample transfer, offered as standard.
Sample/wafer size	Ø 50 mm (2”)	Ø 100 mm (4”)	Ø 150 mm (6”)	Ø 200 mm (8”)
System mounting flange size	Upon request	CF 14” OD	CF 14” OD	Upon request

 Configure your EpiPRO for an online quotation, using our product code selector (below).