Linear Shutters for UHV Deposition


UHV Design manufactures a range of linear stroke shutters for flux switching various deposition sources. Designed essentially for the demanding requirements of Molecular Beam Epitaxy, strict attention has also been applied to the low particulate operation essential in proven production techniques such as Sputtering. All products in this range are fully bakeable and constructed from materials compatible with ultra high vacuum, however, we have ensured prices remain competitive for more standard vacuum applications.

A particularly exciting new development is our Rocking Beam Shutter. Rotating pivot bearings are the only mechanism inside vacuum for linear travel of the shutter blade. The motion is transmitted through the vacuum enclosure with a MagiDrive eliminating the need for bellows. This ensures an elegantly simple and reliable component. A pneumatic actuator is linked to MagiDrive through a camshaft, reducing end of travel shock for high speed applications.

All linear shutters may be quoted with molybdenum, tantalum, PBN or stainless steel blades to custom design.   For detailed specifications and customer drawings for this range of products please contact your local agent or the factory direct.

8-Channel Controller

Linear shutters are available with an 8 channel shutter control unit for independent control over eight 24Vdc solenoid coils. The device can be operated from the front panel or via the computer control port. The unit is fully CE marked and is compatible with 100-250V operation.

Please contact sales for further information

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