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Linear Shutters for UHV Deposition |
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UHV Design manufactures a range
of linear stroke shutters for flux switching various deposition sources.
Designed essentially for the demanding requirements of Molecular Beam
Epitaxy, strict attention has also been applied to the low particulate
operation essential in proven production techniques such as Sputtering.
All products in this range are fully bakeable and constructed from
materials compatible with ultra high vacuum, however, we have ensured
prices remain competitive for more standard vacuum applications.
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A
particularly exciting new development is our Rocking Beam Shutter.
Rotating pivot bearings are the only mechanism inside vacuum for linear
travel of the shutter blade. The motion is transmitted through the vacuum
enclosure with a MagiDrive eliminating the need for bellows. This ensures
an elegantly simple and reliable component. A pneumatic actuator is linked
to MagiDrive through a camshaft, reducing end of travel shock for high
speed applications.
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All
linear shutters may be quoted with molybdenum, tantalum, PBN or stainless
steel blades to custom design. For detailed specifications and
customer drawings for this range of products please contact your local
agent or the factory direct.
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8-Channel Controller
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Linear shutters are available with an 8
channel shutter control unit for independent control over eight 24Vdc
solenoid coils. The device can be operated from the front panel or via the
computer control port. The unit is fully CE marked and is compatible with
100-250V operation. |
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Please
contact sales for further information |
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