A high torque magnetically-coupled MagiDrive provides arm rotation to align with the desired chamber port. A second MagiDrive is used to drive the innovative telescopic mechanism to provide an arm extension of 760mm to transport the sample in and out of the desired satellite chamber.
A linear shift mechanism is used to provide 50mm lift/lower of the sample arm for gravity based sample hand off, typically used on our MBE, sputtering and CVD sample manipulators and heating stages.
The 3-axis RTTA can be fully motorised using stepper or SMART motors. Alternatively the RTTA can be configured to accept any standard NEMA23 frame motor.