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| Rotary
Source Shutters |
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Introduction |
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Actuation details |
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UHV Design’s high quality rotary
source shutters are becoming an industry standard for flux switching
solutions. The pneumatic actuation provides a simple, low cost solution
for shutter applications such as sputter sources, ion guns or viewport
shutters. |
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A solenoid operated spool valve,
switches compressed gas between the actuator ports. Energising the
solenoid will sweep the shutter through the required angle;
de-energising the solenoid, returns the shutter to its start position.
Please click
here to view pneumatic actuator specifications.
Actuators can also be fitted with ‘Auto
Switch’ assemblies, complete with Reed Switches and visual position
indication. For this option, please add an ‘I’
to the middle of the part number before the ‘X’ ie. MD10RAIX000Z. |
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Range |
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The range includes seven different
MagiDrives, to match the torque requirements of each application. Each
drive is fitted with an external pneumatic actuator, providing
adjustable sweep between 30-170º. Flow control valves are also supplied
to adjust the speed of actuation. Use of the MagiDrive range ensures
vacuum integrity through the ‘vacuum envelope’ design. |
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Shaft attachment |
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Specialist requirements |
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The majority of shutters are supplied
with short shafts for end users to mount their shaft/blade assemblies.
The larger MD35 shutters are provided with spigot flanges to provide a
rigid coupling to the driven load. |
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Customised shafts and shutter blades
are available upon request. Additionally, extended bearing housings are
also available for longer shafts. Please contact
sales for further information. |
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