UHV Design offers a range of viewport shutters to protect system windows during deposition.  The shutters are available in four sizes from CF38 to CF150 (2-3/4” OD to 8” OD) and are fitted with a MagiDrive rotary feedthrough to provide blade motion.

The shutters are suitable for use with RHEED windows due to the MagiDrives low stray magnetic field. Please contact UHV Design for full technical detail. Viewport shutters can be either manually or pneumatically actuated.

Manual Actuation

Shutter Blades

Manually actuated viewport shutters are fitted with the external friction control system. This ensures that the blade remains in the set position.

Due to varying international flange standards, the larger viewport shutters are also available with smaller blades to suit reduced bores.

Pneumatic Actuation

Miniature Actuator

Viewport shutters can also be fitted with a pneumatically actuated MagiDrive. This enables remote control of the shutter blade position. Specific features of the pneumatically actuated MagiDrives can be found in the ‘Rotary Source Shutter’ section (click here to view).

Viewport shutters are fitted with the MD16 MagiDrive as standard. The two smaller shutters can also be fitted with a miniature actuator, the MD10 MagiDrive, for applications where space is a primary constraint.