| Criteria
/ Part Number |
XY 100/64-H |
XY 100/64-IS |
| Travelling flange |
114mm (4.5”)
OD CFNW64 with M8 straddled holes |
| Fixed system
mounting flange |
150mm
(6”) OD CFNW100 with M8 straddled holes |
| Maximum X or Y
travel |
+/-31mm |
| Bellows Bore |
90mm |
| Clear Bore |
60mm |
| Flange face to flange face |
182mm |
| Drive
mechanism |
Precision
stainless steel leadscrew |
| X
or Y resolution |
0.01mm |
0.0005mm |
| X
or Y accuracy |
+/-0.01mm |
| Compression
strain due to 1 atmosphere |
<0.2mm |
| Applied
load horizontally mounted |
20Nm |
| Applied
load vertically mounted |
100N |
| Angular
deflection due to applied load |
<0.06° |
| Actuator |
Micrometer
handwheel
and positive or negative displacement scale |
Stepper
motor and
combined gearbox |
| Maximum
bakeout |
250°C |
250°C
with motor removed |
| Dimensional
Drawings |
Click
here to view |
Click
here to view |