XY100/64- MultiBase XY stage specifications

The above photograph shows the manually actuated XY100/64 MultiBase.  Part numbers for this series begin with XY100/64- and terminate with either an 'H' for manual handwheel actuation or 'IS' for the stepper motor driven configuration.   The above photograph shows the XY100/64-H manually actuated stage fitted with a manually actuated linear shift mechanism to provide 100mm Z motion.

General Specifications

Criteria / Part Number XY 100/64-H XY 100/64-IS
Travelling flange 114mm (4.5”) OD CFNW64 with M8 straddled holes
Fixed system mounting flange 150mm (6”) OD CFNW100 with M8 straddled holes
Maximum X or Y travel +/-31mm
Bellows Bore 90mm
Clear Bore 60mm
Flange face to flange face 182mm
Drive mechanism Precision stainless steel leadscrew
X or Y resolution 0.01mm 0.0005mm
X or Y accuracy +/-0.01mm
Compression strain due to 1 atmosphere <0.2mm
Applied load horizontally mounted 20Nm
Applied load vertically mounted 100N
Angular deflection due to applied load <0.06°
Actuator Micrometer handwheel 
and positive or negative displacement scale
Stepper motor and 
combined gearbox
Maximum bakeout 250°C 250°C with motor removed
Dimensional Drawings Click here to view Click here to view
 

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