Bellows sealed Linear Shift Mechanisms (LSMs) provide linear motion along the port axis (Z). Typical applications include the positioning of beamline filters, adjustment of sputter sources and deposition stages through to production style applications. 

UHV Design has the largest range of LSMs in the world, ranging from CF35 to CF150 flanges, up to 1m stroke, tilt & X alignment versions with manual, pneumatic and motorisation options, all available with a range of position encoders.

Compact Linear Shift (CLSM)

A compact solution to linear motion along the port axis (Z). The CLSM series provides the shortest available flange-to-flange dimension, without compromising on performance or reliability.

Click to learn more and view 3D models

Standard Linear Shift (LSM & HLSM)

The LSM is the most comprehensive series in the range, offering the largest number of flange, stroke and actuation options. CF38 to CF150 flanges are available with strokes up to 350mm as standard.

​Click to learn more and view 3D models

Linear Shift with Integrated Tilt (LSMT)

The LSMT is based on the standard LSM series with the additional facility to tilt the moving flange by +/- 2° for final alignment, acting as an integrated port aligner. Typically used on beamlines to align diagnostics or for ion/sputter source alignment. 

​Click to learn more and view 3D models

Linear Shift with Integrated X  Shift (LSMX)

The LSMX is based on the standard LSM series. Where the LSMX version differs is that, in addition to the Z motion, the user has the option to adjust the X motion of the moving flange by up to +/-5mm via a manual thumb wheel.

​
Click to learn more and view 3D models

Long  Travel Linear Shift Mechanism (HLSML)

The HLSML provides strokes of up to 1000mm (39") with high precision motion maintained throughout the stroke. Available with CF38 and CF64 flanges, the HLSML is also chosen for shorter strokes where additional stability is required.

​Click to learn more and view 3D models

High Speed Linear Shift Mechanism (PLSML)

By using a ballscrew mechanism in place of the standard leadscrew we can offer linear shift mechanisms with an actuation speed up to 100mm/s. These are typically used for high duty cycle applications and high speed wire scanners.

Click to learn more and view 3D models