Products   Deposition stages   EPS series

Preparation stage | EPS series
Substrate parallel to plane of mounting flange

Cost-effective in-line preparation stages for 2" & 4" substrate preparation offering high uniformity heating to 800°C with substrate rotation, height adjustment and shutter options.

 

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Key features

  • 2" or 4" substrates
  • Substrate heating to 800°C
  • Substrate rotation to 60rpm
  • 50mm height adjustment
  • Manual and motorised actuation
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The EPS series of in-line preparation stages support the substrate parallel to the mounting flange. The stationary EPS heating module provides durable and uniform heating of 2" or 4" substrates to 800°C with Molybdenum heat shields provided to minimise heat loss. A Type K thermocouple is provided as standard.

Manual or motorised substrate rotation to 60rpm is provided by the magenetically-coupled MagiDrive rotary drives. Eliminating unnecessary bellows and dynamic seals from the EPS ensures true UHV performance and increases reliability.

In addition to substrate rotation, the 50mm height adjustment option allows the substrate position to be optimised via manual or motorised actuation. The EPS series of preparation stages provide cost-effective and  durable sample preparation capability. For higher temperature heating, DC/RF biasing or additional capabilities see the EC-I series.

If you like to request a quotation please complete our EpiCentre questionnaire which can be download using the link below and when completed please send to sales@uhvdesign.com:

Download EpiCentre questionnaire

EPS Series Specification Table

 

Option 1 Option 2 Option 3

 

•    Heating to 800ºC                                                
•    Heating to 800ºC
•    Substrate rotation option (motorised)
•    Heating to 800ºC
•    Substrate rotation (motorised)
•    50mm height adjustment option (manual)

 

EPS    
Substrate size 50mm (2") 100mm (4")
Mounting flange size CF150/8" OD system flange CF200/10" OD system flange
Substrate heating 800°C  
Heater element Refractory metal module with Silicon Carbide Coated Graphite (SiCg) heating element
Flange to cradle distance 200mm  
Height adjustment (option) 50mm  
Fixed height shutter (option) Includes extended bearing housing for 4" substrates
Thermocouple Type K