This radial motion is used to align the transfer arm with the desired chamber port achieving angular reproducibility of <0.2mm. A second MagiDrive is used to drive the innovative telescopic mechanism which provides an arm extension of 760mm (2.5x that of conventional designs) to transport the sample in and out of the desired satellite chamber. The precision slide mechanism achieves linear reproducibility of <0.2mm with <1mm deflection at full extension with a 10N load. The RTTA is available in 2-axis and 3-axis versions.
The 2-axis RTTA provides rotation for port alignment and arm extension for sample transfer. The 3-axis RTTA also includes the ability to lift and lower the sample arm for gravity based hand off typically used on our MBE, sputtering and CVD sample manipulators and heating stages.