CLSM series

CLSM series

A compact solution to linear motion along the port axis (Z). The CLSM series provides the shortest available flange-to-flange dimension, without compromising on performance or reliability.

Download technical datasheet

Key features

  • ​Compact design
  • Smooth kinematic motion
  • Reliable and rigid construction
  • True UHV performance
  • Bakeable to 250°C
  • Demountable bellows assembly with min 5,000 cycles


The CLSM compact series offers the shortest flange-to-flange dimension in the range. As such, the series is offered with limited flange and stroke options.

Actuation methods 

The series can be actuated via a manual handwheel, pneumatic cylinder, DC motor or Stepper motor. Each CLSM can be supplied with a digital linear scale, offering visual position indication with 10 micron resolution.

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MODEL Flange information Bolt holes Clear Bore (mm) Maximum Bakeout
Flange code Flange size Travelling flange Mounting flange
CLSM 38 CF38 (2.75" OD) M6 Tapped M6 Tapped 38 250°C
Available Downloads  
CLSM Technical Datasheet Download