LSM and HLSM series

LSM and HLSM series

Production-proven linear motion along the port axis (Z) for sample positioning and production applications.

Comprehensive series offering true UHV performance with a vast range of flange sizes, strokes, actuation and encoder options.

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Key features

  • 2x flange parallelism compared with conventional designs
  • 2x load-carrying capability compared with conventional units
  • Smooth kinematic motion
  • 10,000 cycle lifetime guarantee
  • Demountable bellows assembly
  • Bakeable to 250°C


The LSM is the most comprehensive series in the range, offering the largest number of flange, stroke and actuation options. CF38 and CF64 flanges within the series are supplied with tapped bolt holes as standard. 

The HLSM series is available as an alternative. This version has clear holes on the mounting flange (fixed) and is available in CF38, CF64, CF100 and CF150 flanges.   Select 'HLSM' in the 'Product Configuration Tool' below to see available options.

Actuation methods 

Both the LSM and HLSM series can be actuated via a manual handwheel, pneumatic cylinder, DC motor or stepper motor. Each LSM/HLSM can also be fitted with a digital linear scale, offering visual position indication with 10 micron resolution. 

Motorised LSM/HLSMs are fitted with bakeable limit and home switches, pre-wired to a single bakeable connector mounted on the frame ('UP' option must be selected). LSM/HLSMs are compatible with UHV Design’s SADC and Stepper motor controller range.

Product configuration tool

Click here to learn how to use the product configuration tool

Configure product

Configure your product using the configuration menu

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Generate preview

Preview your configuration by clicking 'Generate preview'

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Request CAD via email

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Request quotation

'Request for quotation' for a single item, or add the item to your enquiry

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MODEL Flange information Bolt holes Clear Bore (mm) Maximum Bakeout
Flange code Flange size Travelling flange Mounting flange
LSM/HLSM 38 CF38 70mm (2.75") OD CF M6 Tapped

LSM - M6 Tapped
HLSM - Clear holes

38 250°C
64 CF64 114mm (4.5") OD CF M8 Tapped LSM - M8 Tapped
HLSM - Clear Holes
HLSM 100 CF100 152mm (6") OD CF M8 Tapped Clear holes 102
150 CF150 203mm (8") OD CF 149
Available downloads  
LSM & HLSM Technical Datasheet Download