Shutter Actuators

Robust, high-duty cycle flux-switching solutions for applications such as sputter sources, ion guns or viewport shutters. Available in seven different sizes to match torque requirements for a range of applications.

Key features

  • Adjustable sweep (30° - 170°)
  • Magnetically-coupled fail-safe design
  • No bellows or dynamic seals
  • Bakeable to 250°C
  • Zero backlash under low load
  • True UHV performance

Specifications

MAGIDRIVE SERIES MD10 MD16 MD40 MD64
Mounting flange CF10
(1" OD CF)
CF16
(1.33" OD CF)
CF40
(2.75" OD CF)
CF64
(4.5" OD CF)
Sweep 30°-170° (adjustable)
Magnetic break-away torque 0.18Nm  0.45 & 1.8Nm 0.45, 1.8 & 9.0Nm 10.0Nm
Maximum air input pressure 6.8 bar (98 PSI)
Flow control port size 4mm OD pipe
  View MD10 View MD16 View MD40 View MD64