XY multibase manipulators

XY multibase manipulators

Precise manipulation in X & Y axes

The multibase XY stage is the first choice for both research and demanding production environments due to its precise motion, true UHV performance and rugged construction which allows mounting in any-orientation.

The MultiBase design includes two parallel flanges. One remains fixed, whilst the other provides the movement. A high quality, supple, edge-welded bellows spans the flanges to accommodate the required motion while ensuring an all-metal vacuum enclosure. The device works by adjusting the position of the travelling flange in relation to the fixed system mounting flange.

Download technical datasheet

Key features

  • Any-orientation mounting without additional supports
  • High precision kinematic drive and guidance system – eliminates need
    for vulnerable cross-roller slides
  • Rigid stops limit X/Y travel protecting the bellows
  • Robust construction for high loads

Positioning of the travelling flange is controlled through two external lead-screws, each benefiting from anti-backlash systems.
A kinematic mechanism ensures smooth and precise motion. This novel mechanism incorporates a high precision drive and guidance system, removing the requirement for vulnerable cross-roller slides used by other manufacturers. Combining this with a rigid construction allows mounting in any-orientation without additional supports. Scales are fitted to each axis for resolving the position of the travelling flange on the manual version. The motorised stages are fitted with stepper motors and pre-wired limit and home switches.

Product configuration tool

Technical Specifications

MODEL XY14-64-38 XY14-100-38 XY31-100-38 XY31-100-64 XY31-150-64 XY57-150-150
Travelling flange CF38 70mm (2.75") OD with M6 straddled holes CF64 114mm (4.5") OD with M8 straddled holes CF150 203mm (8") OD with M8 straddled holes
Mounting flange 114mm (4.5") with M8 straddled holes CF100 152mm (6") OD with M8 straddled holes CF150 203mm (8") OD with M8 straddled holes
X Y travel +/- 10mm +/-22mm +/-40mm
     
(+/- 14mm vector) (+/- 31mm vector) (+/- 57mm vector)
Clear bore diameter 51mm 90mm 150mm
Maximum Probe OD 22mm max to achieve full movement 28mm max to achieve full movement 36.5mm max to achieve full movement
X Y resolution Manual drive +/- 0.01mm. Stepper motor driven +/- 0.005mm Manual drive +/- 0.01mm. Stepper motor driven +/- 0.005mm