Configured XYZ
XY manipulator combined with Linear Shift Mechanism

Ultra-stable dual bellows stages providing smooth, precise motion with up to +/-57mm X& Y travel and up to 1000mm in Z travel. Can be mounted in any-orientation.

Multistage manipulators provide precise motion along the X, Y and Z axes. Their robust construction provides a stable platform, enabling mounting in any-orientation.

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Key Features

  • 25mm - 1,000mm Z motion in combination with XY
  • Mounting in any orientation without additional supports
  • Smooth, precise kinematic motion
  • Robust construction for high loads
  • True UHV performance
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The range is modular utilising the MultiBase XY manipulators to provide two generic platforms offering +/-14mm, +/-31mm or +/- 57mm of motion (vector sum of X & Y). Various Linear Shift Mechanisms can then be fitted to these platforms to provide between 100mm (4") and 1000mm (39") Z stroke. The kinematic motion provided results in smooth and reliable motion.

MultiStage manipulators are offered with manual or motorised actuation. Manual XY actuation is delivered via a combined micrometer handwheel and linear scale assembly. Manual Z motion can be fitted with a 1mm increment scale.

DC and stepper motor driven solutions are also available, along with 'plug and play' motion control systems.

Combining the MultiStage with UHV Design’s MagiDrive rotary feedthroughs allows transmission of rotary motion through the centre. In addition, the hollow MagiDrive allows services, for example heating and cooling apparatus, to be passed through the centre.

The hollow configuration enables stacking of MagiDrives to provide further independent axes of rotation. In this way, the three axes of motion already provided by the MultiStage can be supplemented with up to three more.

Custom shafts, service collars and dual point support can also be provided.

XYZ Combination Examples

MODEL XY14-64-38 XY14-100-38 XY31-100-38 XY31-100-64 XY31-150-64 XY57-150-150
Travelling Flange CF38 70mm (2.75") OD with M6 straddled holes CF64 114mm (4.5") OD with M8 straddled holes CF150 203mm (8") OD with M8 straddled holes
Mounting Flange CF64 114mm (4.5") OD with M8 straddled holes CF100 152mm (6") OD with M8 straddled holes CF150 203mm (8") OD with M8 straddled holes
X Y Travel +/-10mm (+/-14mm vector) +/-22mm (+/-31mm vector) +/-40mm (+/-57mm vector)
X Y Resolution Manual drive +/- 0.01mm. Stepper motor driven +/- 0.005mm (based upon 400 half-steps per revolution).
Z Travel Z shifts are available with following strokes as standard: 100, 200, 400, 600, 800 and 1000mm
Z Resolution Manual Manual drive +/- 0.5mm with engraved shaft, with digital linear scale 0.01mm
Z Resolution per 1/2 step motorised

100 & 200mm Z travel - +/-0.000254mm

400 & 600mm Z travel - +/-0.000508mm

100 & 200mm Z travel - +/-0.000127mmm

300 to 1000mm Z travel - +/-0.000635mm


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