Deposition Stages for UHV Applications

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  • 2-axis Rotary Telescopic Transfer Arm manualPDF (2mb)
  • 3-axis Rotary Telescopic Transfer Arm manualPDF (2mb)
  • ALBD - linear bellows drive manualPDF (1mb)
  • ALBD - linear bellows drive manualPDF (1mb)
  • Compact XYZ manipulator with integrated tilt manualPDF (4mb)
  • Compact linear shift manualPDF (4mb)
  • High-speed Linear Shift Mechanism manualPDF (4mb)
  • Hollow rotary drive with integrated lift & lower manualPDF (3mb)
  • Linear & rotary magnetically-coupled transfer arm manualPDF (1mb)
  • Linear & rotary magnetically-coupled transfer arm manualPDF (1mb)
  • Linear Shift with Integrated Tilt (LSMT) Bellows-Sealed Actuator manualPDF (4mb)
  • Linear Shift with Integrated X Shift (LSMX) Bellows Sealed Actuator manualPDF (7mb)
  • Linear Telescopic Transfer Arm manualPDF (7mb)
  • Linear magnetically-coupled transfer arm with elevating platform manualPDF (1mb)
  • Linear magnetically-coupled transfer arm with elevating platform manualPDF (1mb)
  • Linear transfer arm manualPDF (1mb)
  • Linear transfer arm manualPDF (1mb)
  • Linear transfer arm with rotating inner shaft manualPDF (1mb)
  • Linear transfer arm with rotating inner shaft manualPDF (1mb)
  • Long Travel Linear Shift Mechanism manualPDF (3mb)
  • MD100H hollow range manualPDF (3mb)
  • MD16N/MD16A solid range manualPDF (3mb)
  • MD35LB hollow range manualPDF (5mb)
  • MD40 solid range manualPDF (3mb)
  • MD40H hollow range manualPDF (2mb)
  • MD40N/MD40A solid range manualPDF (3mb)
  • MD63H hollow range manualPDF (4mb)
  • MD64LB(M) hollow range manualPDF (5mb)
  • MPP - linear unguided motion manualPDF (2mb)
  • MPPL - linear guided motion manualPDF (2mb)
  • MPPRL - rotary and linear motion manualPDF (2mb)
  • Magnetically-coupled triple axis transfer arm manualPDF (645kb)
  • Modular Stepper Motor Controller manualPDF (1mb)
  • Modular Stepper Motor Controller manualPDF (839kb)
  • Modular Stepper Motor Controller manualPDF (2mb)
  • Modular Stepper Motor Controller manualPDF (450kb)
  • Modular Stepper Motor Controller manualZIP (4mb)
  • Modular Stepper Motor Controller manualE (188kb)
  • Port aligner range manualPDF (663kb)
  • Single Axis Y-Shift manualPDF (2mb)
  • Standard linear shift manualPDF (4mb)
  • Standard linear shift manualPDF (4mb)
  • Standard linear shift manualPDF (3mb)
  • Viewport shutters manualPDF (850kb)
  • WS40 Wobble Stick Range manualPDF (1mb)
  • WSG40 Range manualPDF (1mb)
  • X&Y Manipulators manualPDF (2mb)
  • XPP Option manualPDF (1mb)
  • XWS40 Range manualPDF (1mb)
  • XWSG40 Range manualPDF (1mb)
  • XY Aligner (XYA) manualPDF (1mb)