2-axis Rotary Telescopic Transfer Arm
360° rotation and 760mm linear extension
Radial Telescopic Transfer Arms for Ultra-High Vacuum (UHV) Systems
The Radial Telescopic Transfer Arm (RTTA) is engineered for precise sample transfer between multiple chambers in ultra-high vacuum (UHV) systems. Designed to operate from a central radial distribution chamber, the RTTA utilises a high-torque, magnetically-coupled MagiDrive to deliver exceptional performance for radial motion. This innovative system provides superior functionality compared to conventional designs, making it a cost-effective choice for preparation and analysis in demanding vacuum environments.
Key Applications:
- Precision transfer of samples between multiple UHV chambers
- Utilised in surface analysis, semiconductor processing, and vacuum deposition
- Ideal for applications requiring high positional accuracy and minimal deflection
Key Features
- 2.5x the reach of traditional systems, offering extended sample handling capabilities
- Typically less than 1.5mm deflection at full extension with a 10N load, ensuring minimal sample movement
- Excellent substrate position reproducibility: less than 0.2mm laterally and axially
- Available in 2-axis and 3-axis variants to accommodate different handling needs
- True UHV performance with no oil, slip rings, or bellows, ensuring a clean vacuum environment
How it works:
- The RTTA aligns with the desired chamber port using radial motion, achieving angular reproducibility of less than 0.2mm
- A second MagiDrive drives the telescopic mechanism, extending the arm up to 760mm (2.5 times the reach of conventional designs) for efficient sample transfer
- The precision slide mechanism ensures linear reproducibility of less than 0.2mm with less than 1mm deflection at full extension with a 10N load
Versions Available:
- 2-axis RTTA: Provides rotation for port alignment and extension for sample transfer
- 3-axis RTTA: Includes vertical lift capability for gravity-based handoff, ideal for MBE, sputtering, and CVD sample manipulators and heating stages
User-friendly Manual Arm Alignment
The manual RTTA features an innovative alignment system with adjustable position stops. These stops engage with spring-loaded bearings and can be aligned with port axes to define default angular positions. This design ensures highly reproducible arm positioning.
True UHV Performance
The RTTA operates with the MD64LB and MD40 magnetically-coupled MagiDrive rotary feedthroughs. The MD64LB offers a break-away torque of approximately 40Nm, providing a rigid coupling ideal for arm rotation. The MD40 actuates the telescopic mechanism, ensuring reliable arm extension and retraction.
Motorised 'Talk Free' Concept
UHV Design’s unique mechanical design addresses the issue of arm rotation causing unwanted movement in the extension assembly (axis cross-talk). By linking the rotary motion of the MD64 to the motor mounting of the MD40, this design eliminates the need for complex software adjustments, maintaining accurate sample positioning during rotation.
Radial Telescopic Transfer Arms for Ultra-High Vacuum (UHV) Systems series and product options
If you would like to discuss your project with our engineering team, please contact us.