Viewport shutters

Viewport shutters

Designed to protect system windows during processes such as vacuum deposition with 100% full closure option.

Utilising the magnetically coupled MagiDrive rotary feedthroughs for shutter actuation, the range can be actuated manually or pneumatically where remote control is required. 

Key features

  • Available on CF38 to CF150 flanges
  • Manual or pneumatic actuation
  • Fully bakeable to 250°C
  • Friction control system
  • 100% full closure option
  • Position switch option

100% FULL CLOSURE ACTUATOR

The VPSFC range of viewport shutters provides 100% protection against the coating of viewports in HV and UHV deposition applications.

The range is available in either AutoClose, Pneumatic or Pneumatic with position-feedback options.

PNEUMATIC ACTUATION

Viewport shutters can also be fitted with a pneumatically actuated MagiDrive. Used in their simplest form, they could be operated remotely from a control panel or switch. For more sophisticated protection, the pneumatically-actuated MagiDrive could be interlocked to the ‘vacuum process’, such that activating a deposition source, for example, would automatically close the viewport shutter. Furthermore, for critical applications, an optional ‘feedback-switch’ assembly can be fitted to the drive to confirm to the process controller that the shutter is in the closed position.

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Specifications

VIEW PORT SHUTTER SPECIFICATION VPS38 VPS64 VPS100 VPS150 
System mounting flange size (with clear holes) CF38 (2¾" OD CF)  CF64 (4½" OD CF) CF100 (6" OD CF) CF150 (8" OD CF) 
Blade aperture coverage (Standard) 88.40% 90.60% 84.00% 87.00%
Blade aperture coverage (Full Closure option) 100% 100% 100% 100%
Bakeout temperature  250°C with pneumatic cylinder removed
Pneumatic option - cylinder sweep set at 90 degrees (adjustable 30-170°)
Pneumatic option - cylinder switch 5-24V 2 wire reed switch
Pneumatic option - max rotation speed 0.5 seconds per 90o 0.5 seconds per 90o 1 second per 90o 1 second per 90o