100% FULL CLOSURE ACTUATOR
The VPSFC range of viewport shutters provides 100% protection against the coating of viewports in HV and UHV deposition applications.
The range is available in either AutoClose, Pneumatic or Pneumatic with position-feedback options.
Viewport shutters can also be fitted with a pneumatically actuated MagiDrive. Used in their simplest form, they could be operated remotely from a control panel or switch. For more sophisticated protection, the pneumatically-actuated MagiDrive could be interlocked to the ‘vacuum process’, such that activating a deposition source, for example, would automatically close the viewport shutter. Furthermore, for critical applications, an optional ‘feedback-switch’ assembly can be fitted to the drive to confirm to the process controller that the shutter is in the closed position.