Triple axis transfer arm
Magnetically-coupled triple axis transfer arm, providing linear and rotary motion with a unique sample gripping mechanism allowing samples to be locked onto and off the probe. Linear and rotary motion of the sample is achieved via a single actuator with stroke length from 304mm to 1219mm. Unique lock/unlock mechanism then activates an independent shaft to provide gripper activation.
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Using the magnetically-coupled triple axis transfer arm, this custom design allows the secure wafer transfer with the ability to flip the wafer by 180 degrees. The wafer is secured and released by screwing the rear portion of the drive thimble in and out. The wafer holder design incorporates a spring mechanism to avoid over compressing the wafer/holder when gripping.
Click to view Wafer Flipper Option