Configuration options
Learn more about motion, heating and cooling options
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XL-T MultiCentre
Single bellows, compact analytical stages
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XL-R MultiCentre
Dual bellows, high stability, precision stages
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Analytical stages
Configurable analytical stages offering up to 5 axes of motion and options for sample biasing, heating to 1200°C and cooling to <30K. MultiCentres...
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Heater modules
Options to provide uniform heating of substrates up to 150mm diameter.
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Sample parking
Sample parking systems
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EC-R series
Substrate at right angle to plane of mounting flange.
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EC-I series
An in-line design presenting the substrate parallel to the mounting flange with rotation, heating and biasing.
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GLAD series
Substrate at a variable glancing angle to the mounting flange.
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Motion controllers
Cost-effective control options for manipulation of the driven mechanism
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